Nanusens solves the problem of stiction in MEMS inertial sensors by going smaller and creating nano-sensors in standard CMOS
Barcelona, Spain — 03 August 2017. Nanusens has announced that its CMOS nano-sensor technology has been successfully used to solve the problem of stiction in MEMS inertial sensors, which is a major source of failure for this type of sensor. “Our first silicon nano-sensor samples from GLOBALFOUNDRIES exceeded our expectations showing outstanding resilience to stiction, …